973-SF6 gas analyst used for simultaneous measurement of humidity, SF 6 purity and SO 2 concentration. Pure SF 6 is the standard filling within GIS, but over time gas compartments become contaminated with water vapor (H 2 O) through permeation and by desorption from internal materials. Whilst water vapor and SF 6 do not normally react with each other, in the presence of a high-energy
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